abstract |
A semiconductor structure includes a semiconductor substrate, a layer of electrically insulating material above the semiconductor substrate, and a layer of semiconductor material above the layer of electrically insulating material. A first transistor includes a first source region, a first drain region, and a first channel region formed in the semiconductor substrate, a first gate insulation layer positioned above the first channel region, and an electrically conductive first gate electrode, wherein the first gate insulation layer includes a first portion of the electrically insulating material. A second transistor includes a second source region, a second drain region, and a second channel region formed in the layer of semiconductor material, a second gate insulation layer positioned above the second channel region, and an electrically conductive second gate electrode, wherein a second portion of the layer of electrically insulating material is positioned below the second channel region. |