patent/US-2016240353-A1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016240353-A1

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75
classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-334
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32568 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32715 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32577
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
filingDate	2016-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5dac6427e1491e284a61cfe18abae422
publicationDate	2016-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-2016240353-A1
titleOfInvention	Method for controlling potential of susceptor of plasma processing apparatus
abstract	Disclosed is a method of suppressing abnormal discharge through a space between a space and a susceptor. A pulse-modulated high frequency wave is supplied from at least one of a first high frequency power supply and a second high frequency power supply. In addition, a DC voltage, which is pulse-modulated in synchronization with the modulated high frequency wave, is applied to the susceptor from a voltage application unit. A voltage value of the modulated DC voltage is set to reduce a difference between a potential of the substrate placed on an electrostatic chuck and a potential of the susceptor.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11158527-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10699921-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11264213-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11049698-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10964512-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10607867-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11101136-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11615941-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10504754-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10943834-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10629473-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10679870-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10699879-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10490406-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11282677-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11670487-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11154903-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10886137-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10707061-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11610761-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11049755-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11276559-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11437242-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10593523-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10573527-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10727080-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10468276-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10468285-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10593553-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019099937-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11276590-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10522371-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11437221-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10465294-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10615047-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10770346-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11189454-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10468267-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11062887-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10490418-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10566206-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10892198-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11594428-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111788654-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10529737-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10978274-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11721527-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I799602-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022028665-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11417534-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11239061-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10431429-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018082861-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10546729-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10755941-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11682560-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10541113-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10541184-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10424463-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10541246-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10573496-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10424464-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10796922-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10424485-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3711082-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11024486-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10854426-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10861676-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11264209-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11637002-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10903052-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11121002-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11328909-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10497573-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11735441-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10497579-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10600639-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10920319-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10920320-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10593560-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10672642-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10872778-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11476093-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10903054-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11361939-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11004689-B2
priorityDate	2015-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4959516-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003219989-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003064225-A1
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID93465 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID56841630 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453342014 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454522586

Total number of triples: 108.