http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016086773-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32834 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32477 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32339 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2015-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_feea50742cecd39c989355486e010ff7 |
| publicationDate | 2016-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2016086773-A1 |
| titleOfInvention | Plasma processing apparatus |
| abstract | A plasma processing apparatus includes a reaction chamber for performing a plasma process on a substrate. A pedestal to receive the substrate thereon is provided in the reaction chamber. The reaction chamber includes an area A to generate the plasma therein, an exhaust area, and an area B provided between the area A and the exhaust area. The plasma is generated in the area B. An inner wall of the area A is covered with a first gasifying material. A plurality of partition members made of a second gasifying material is provided downstream of a surface of the substrate on the pedestal so as to divide an inside of the chamber into the area A and the area B to prevent a first particle present in the area B from diffusing into the area A. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108573981-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I797497-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11180848-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022148861-A1 |
| priorityDate | 2014-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 92.