| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_421cadb30fc0074fe61126eb980d19d6 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2605
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2443
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2445
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-24455 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-2204
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-2251 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-225 |
| filingDate |
2014-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27d40c7f2506a10a50b5f3fe870df271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cdc74fb7e7b66bfbf9df01b60cc7d477
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f17c07d6cca87d7ae0d38faff74bb613
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7380594399550cccebb4151015a5173f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e26f3d8a67e0b9e3b92a7a1cd721f2c8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_866c77b4eff0b045f8db1d5ee12108d8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a25618df5d40f23f7ab8cd93c2af287b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f0c588c2d409cbd57723658f8d4b0a1 |
| publicationDate |
2016-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2016025659-A1 |
| titleOfInvention |
Charged Particle Beam Device, Sample Observation Method, Sample Platform, Observation System, and Light Emitting Member |
| abstract |
The purpose of the present invention is to eliminate the effort in placement and extraction of samples in observations using transmitted charged particles. A charged particle beam device ( 601 ) is characterized by having: a charged particle optical lens tube that irradiates a sample ( 6 ) with a primary charged particle beam; a sample stage on which a light emitting member ( 500 ) that emits light because of charged particles that have come by transmission internally in the sample ( 6 ) or scattering therefrom or a sample platform ( 600 ) having the light emitting member ( 500 ) is attachably and detachably disposed; and a detector ( 503 ) that detects the light emitted by the light emitting member. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11062876-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10937626-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10431416-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10634635-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9812288-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018204477-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10777379-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102021123004-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017069458-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/NL-2023249-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020246881-A1 |
| priorityDate |
2013-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |