| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_64e552a3626bfc4b35be6a06428f8c5e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-24455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2808
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2443
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2445
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-20214
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-20207 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q60-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-226
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-1474
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-20 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28 |
| filingDate |
2020-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc20f70ba186abab125c3cb8af7b0c4c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0415694a113388536f6af7ced64b0942 |
| publicationDate |
2020-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2020246881-A1 |
| titleOfInvention |
Apparatus and method for detecting one or more scanning charged particle beams |
| abstract |
The invention relates to an apparatus for inspecting a sample. The apparatus comprises: a sample holder (10) for holding the sample (5), a charged particle column (7, 8) for generating and focusing one or more charged particle beams at one or more charged particle beam spots onto the sample, a scanning deflector for moving said charged particle beam spot(s) over the sample, a photon detector (4) configured for detecting photons created when said one or more charged particle beams impinge on the sample or when said one or more charged particle beams impinge onto a layer of luminescent material (6) after transmission through the sample, an optical assembly (2) for projecting or imaging at least part of said photons from said charged particle beam spot(s) along an optical beam path onto said photon detector, and a shifting unit (3) for shifting the optical beam path and/or the photon detector with respect to each other. |
| priorityDate |
2019-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |