| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_82cbc291d77c061ac9a216f86ec010a3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7ccd8071aab10f1086eaea534debc121 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N50-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N50-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B61-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2223-079
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-24485
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2223-076
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-221
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2223-6116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2611
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L43-02 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-20091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-2252 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L43-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-20091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-22 |
| filingDate |
2019-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4dd8ca192cc10a96d6fe83ee1cc51e6e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25acad9c2400c3b5ff2032f4b46aa6d9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_687aa86332e770f36bbc27e794fb7a55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d0e1092db59a3cf6ac174b9125a3700 |
| publicationDate |
2021-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-11062876-B2 |
| titleOfInvention |
Evaluation method and evaluation apparatus for electronic device |
| abstract |
An evaluation method for an electronic device provided with an insulating film between a pair of electrode layers includes preparing a sample that has a tunnel barrier insulating film as the insulating film; irradiating the sample with electron beams from a plurality of angles to acquire a plurality of images; and performing image processing using the plurality of images to reconstruct a stereoscopic image and generate a cross-sectional image of the sample from the stereoscopic image. |
| priorityDate |
2018-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |