| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-327
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 |
| filingDate |
2015-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9b0ef9ebf762dfecff14ee164778689
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8afbed79829e45bcfa8c1150ec8bb029
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d8eb0423c882e0be7f0ca48a9635f1a4 |
| publicationDate |
2015-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2015277228-A1 |
| titleOfInvention |
Coating agent for forming fine pattern |
| abstract |
A coating agent for forming a fine pattern capable of simultaneously achieving slimming and roughness reduction of a positive-type resist pattern without deteriorating the cross-sectional shape of the slimmed positive type resist pattern and a method of slimming treatment of a positive-type resist pattern using the above coating agent for forming a fine pattern. A coating agent comprising a nitrogen-containing compound with a specific structure and an organic solvent is used as the coating agent for forming fine pattern used for a positive-type resist pattern. The coating agent may include a basic nitrogen-containing compound and/or a water-soluble polymer or an alkali-soluble polymer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10684549-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108780284-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180124078-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102253729-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019079398-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10859916-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018060100-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017157506-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020325583-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I748998-B |
| priorityDate |
2014-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |