| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd8317526535265948196ba60856c843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cfccd7bff8c839ebb2254f67d9bf95bf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38a06170e4bcab8f1bb2eba1584c569a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-425
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70925
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-327 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate |
2007-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea58ba3879ca1f9596431efb219c499a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b93597e448d046f76a1d57a60c104995
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_97555ea124b4753486727adb80c9aa9e |
| publicationDate |
2010-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010233634-A1 |
| titleOfInvention |
Processing Liquid for Resist Substrate and Method of Processing Resist Substrate Using the Same |
| abstract |
The present invention provides a resist substrate treating solution and a method for pattern formation using that treating solution, and thereby problems such as foreign substances on the substrate surface, pattern collapse and pattern roughness can be easily solved at the same time. The treating solution comprises water and an alkylene oxide adduct of a primary amine having a hydrocarbon group of 11 to 30 carbon atoms or of ammonia. The method for pattern formation according to the invention comprises a step of treating the developed pattern with that treating solution. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015277228-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9417532-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9740105-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9097977-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8039201-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009130591-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017365486-A1 |
| priorityDate |
2006-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |