http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013140690-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_546587ca6e2994463ccf4f7bed9eaf9d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_584ae2a6e1185f80132b2839968c862e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_511adc92d644031ffe0a2ff46351e3e2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c0430c46c124dc663664d00922d788ec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c2ae6eb8944c7c769196340944e64d7a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_796f50c9effafd53868026deddb20b50
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-181
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-1405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-0557
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-73204
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-0401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0705
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-067
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-11011
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05558
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0132
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-13025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-131
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-14104
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-49827
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76879
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-498
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
filingDate 2011-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ea63379f64841b7b7ddf832f8143207
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9084f4a622b5f89557fbb2eb1f26701
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e00d04aac4a1f20cf48d60b76be1bcb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b455cb58fde7d570744dac8de03869a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_57fa2194570ccd0b715779afd297e459
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a18b80996152151df28c5c429cb8b18c
publicationDate 2013-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2013140690-A1
titleOfInvention TSV Structures and Methods for Forming the Same
abstract A device includes a substrate having a front side and a backside, a through-via extending from the backside to the front side of the substrate, and a conductive pad on the backside of the substrate and over the through-via. The conductive pad has a substantially planar top surface. A conductive bump has a non-planar top surface over the substantially planar top surface and aligned to the through-via. The conductive bump and the conductive pad are formed of a same material. No interface is formed between the conductive bump and the conductive pad.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9245790-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014203827-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013292824-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9711478-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9711474-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015179580-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017154850-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017110429-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10566288-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106816426-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112018128-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10490468-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11107767-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11764139-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9431332-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8994172-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020083125-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020091022-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10978362-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10147682-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9184113-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10978363-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11062987-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111785681-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015179545-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018218953-A1
priorityDate 2011-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID935
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128510911
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87217
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412550040
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415782876

Total number of triples: 76.