| abstract |
In processes after a TSV is formed, occasionally, cracks appear in an insulation film after the insulation film that is a film for preventing Cu from diffusing is formed and the exposed Cu discolors at a succeeding process of pattern forming such as etching or asking. It is estimated that the problems occur because the volume of Cu expands by heat history at the process of forming a diffusion preventive film. When such film cracking occurs, various problems such as the destruction of the function of a Cu diffusion preventive film and conduction fault with upper wiring caused by the oxidation of Cu at the upper part of a TSV are induced. In the invention of the present application, in a semiconductor integrated circuit device having a through electrode, when a through via is formed after a pre-metal wiring layer is formed, an insulation film of a kind of silicon nitride is used as a metal diffusion preventive insulation film at the interface of an interlayer insulation film touching the top end of the through electrode and an insulation film of kind of silicon carbide is used as a metal diffusion preventive insulation film at the interfaces of the other interlayer insulation films. |