| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1eb9cd2af2f87dcf20b0fbbdfe79996e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45536
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45534
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45538
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-22 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 |
| filingDate |
2009-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d77deb53874baa43b2de14dba07b0cca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b68f219320964a19967b540243dfdca |
| publicationDate |
2010-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010055342-A1 |
| titleOfInvention |
Modulated ion-induced atomic layer deposition (mii-ald) |
| abstract |
The present invention relates to a cyclic deposition process suitable for depositing an elemental film. The process employs an enhanced atomic layer deposition technique. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006236934-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8053372-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9758868-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9252024-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021355580-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9399228-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014186563-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11725282-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012109523-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012109523-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10287683-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11111581-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8747964-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9245793-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10699881-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2023187177-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109417028-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9388494-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018082861-A1 |
| priorityDate |
2000-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |