| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd83260a96356882b5f50dd097411a72 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-14181
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-13025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-485
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-13 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2009-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ade07040c742f42b62477231dbbd34f5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7775c7757e49bd97ec065f9b5c352dd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e6f44bd987ba24f7638001865ec7093 |
| publicationDate |
2010-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010048019-A1 |
| titleOfInvention |
Method for manufacturing a semiconductor device |
| abstract |
A falling off of a through electrode is inhibited without decreasing a reliability of a semiconductor device including a through electrode. A semiconductor device 100 includes: a silicon substrate 101; a through electrode 129 extending through the silicon substrate 101; and a first insulating ring 130 provided in a circumference of a side surface of the through electrode 129 and extending through the semiconductor substrate 101. In addition, the semiconductor device 100 also includes a protruding portion 146, being provided at least in the vicinity of a back surface of a device-forming surface of the semiconductor substrate 101 so as to contact with the through electrode 129, and protruding in a direction along the surface of the semiconductor substrate 101 toward an interior of the through electrode 129. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014057434-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009212438-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9012324-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012142187-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104600060-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8202801-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015115462-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9147642-B2 |
| priorityDate |
2005-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |