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publicationDate 2009-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2009239373-A1
titleOfInvention Chemical mechanical polishing method and method of manufacturing semiconductor device
abstract A chemical mechanical polishing method comprises polishing an organic film using a slurry including polymer particles having a surface functional group and a water-soluble polymer.
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