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publicationDate 2018-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2018101583-A1
titleOfInvention Slurry composition for polishing organic film and method for polishing organic film using same
abstract A slurry composition for polishing an organic film of the present invention comprises an oxidant, an organic acid, a polishing accelerator comprising a repeating unit derived from maleic acid or maleic anhydride, and water, wherein the polishing accelerator is included with a smaller weight than the organic acid.
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