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filingDate 2009-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2009-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2009191330-A1
titleOfInvention Antimony Precursors for GST Films in ALD/CVD Processes
abstract The present invention is a process of making a germanium-antimony-tellurium alloy film using a process selected from the group consisting of atomic layer deposition and chemical vapor deposition, wherein a silylantimony precursor is used as a source of antimony for the alloy film. Novel silylantimony compounds are also disclosed.
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