| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5f4468d0cd0f1a0d1a19cc9b3e66f256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f1f1c0d42a00c37baf53e5b81ffab293
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a34c65523f83a410093ddeecdb17eb13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9a3e3f46e4c2e8cd2815b73cfc495df8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_11082a4cd52dcacb649a5d9138dc0782 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T117-1004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T117-10 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B15-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C9-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-14 |
| filingDate |
2007-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_89738dd1e629198e4b939ee0b3db0ed2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c38e11fb63be2c6b33b0d1d3e31ef8ea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_beb5dc3cfbf6a0c8c7c835642e08fb5f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c8883cc5a31c89889abe540d1e10387
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0046646365f423408f7a5e5bd9adf949 |
| publicationDate |
2009-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009130333-A1 |
| titleOfInvention |
Apparatus and Methods for Preparation of High-Purity Silicon Rods Using Mixed Core Means |
| abstract |
Disclosed are a method and an apparatus for preparing a polycrystalline silicon rod using a mixed core means, comprising: installing a first core means made of a resistive material together with a second core means made of silicon material in an inner space of a deposition reactor; electrically heating the first core means and pre-heating the second core by the first core means which is electrically heated; electrically heating the preheated second core means; and supplying a reaction gas into the inner space in a state where the first core means and the second core means are electrically heated for silicon deposition. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010269754-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9255325-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8961689-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9701541-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013209684-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8540818-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015017349-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017283981-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011129621-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10287704-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014170337-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10513438-B2 |
| priorityDate |
2006-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |