| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b7f47313158a55c53c85523aff6ed82d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B28-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-46 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45563
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-24 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C11-00 |
| filingDate |
2009-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66ceff8810c8a0e8a2e0603bddfd3526 |
| publicationDate |
2011-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011129621-A1 |
| titleOfInvention |
Systems and methods for distributing gas in a chemical vapor deposition reactor |
| abstract |
Systems and methods for the production of polysilicon or another material via chemical vapor deposition in a reactor are provided in which gas is distributed using a silicon standpipe. The silicon standpipe can be attached to the reactor system using a nozzle coupler such that precursor gases may be injected to various portions of the reaction chamber. As a result, gas flow can be improved throughout the reactor chamber, which can increase the yield of polysilicon, improve the quality of polysilicon, and reduce the consumption of energy. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112342529-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10525426-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9315895-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101146864-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011274851-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016067663-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017108714-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8961689-B2 |
| priorityDate |
2008-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |