| abstract |
A process for producing high purity semiconductor materials and metals by ermal decomposition of a gaseous compound of said materials, comprising the steps of arranging conductive carrier bodies in electrical current branches in a multi-phase a.c. system, then passing an equal amount of electrical current through each of the branches so as to heat the carrier bodies to deposition temperature, regulating the current in each of the branches so that the same magnitude of current flows through each branch. |