http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008206977-A1

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inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_19e64fc6e9e44feec3516117d1750177
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publicationDate 2008-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2008206977-A1
titleOfInvention Methods of forming wiring to transistor and related transistor
abstract Methods of wiring to a transistor and a related transistor are disclosed. In one embodiment, the method includes a method of forming wiring to a transistor, the method comprising: forming a transistor on a semiconductor-on-insulator (SOI) substrate using masks that are mirror images of an intended layout, the forming including forming a gate and a source/drain region for each and a channel, the SOI substrate including a semiconductor-on-insulator (SOI) layer, a buried insulator layer and a silicon substrate; forming a dielectric layer over the transistor; bonding the dielectric layer to another substrate; removing the silicon substrate from the SOI substrate to the buried insulator layer; forming a contact to each of the source/drain region and the gate from a channel side of the gate; and forming at least one wiring to the contacts on the channel side of the gate.
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