| abstract |
The inventive method of producing silicon comprises reacting gaseous trichlorosilane with hydrogen to deposit silicon onto a substrate and to produce silicon tetrachloride by-product, vaporizing the silicon tetrachloride by-product to form gaseous silicon tetrachloride, converting the gaseous silicon tetrachloride to finely divided silicon, forming a silicon melt by melting the finely divided silicon, and forming solid silicon from the silicon melt. |