| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_96ef001c28a4cd401968f36dd3e7783f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-26 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0021 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F1-00 |
| filingDate |
2007-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15f25b597ceded918a7243d96513f372 |
| publicationDate |
2007-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007246064-A1 |
| titleOfInvention |
Method of treating a substrate |
| abstract |
A method of cleaning a substrate within a controlled environment includes placing the substrate into a high pressure vessel. The high pressure vessel is then supplied with a dense fluid under pressure. The dense fluid is contacted with the substrate for a selected period of time to at least partially remove a contaminant contained on the substrate. After the selected period of time, the vessel is depressurized to at least partially convert the dense fluid into a vapor. The vapor is then subjected to an energy field to form a plasma within the vessel which is used to treat the substrate for a second selected period of time. The thus cleaned substrate is then removed from the vessel. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009200493-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7888661-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009107526-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10399128-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9387511-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016281037-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006175291-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9352355-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11302669-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10661287-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9816055-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10639691-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108472693-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009226598-A1 |
| priorityDate |
2002-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |