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publicationDate 2006-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2006216839-A1
titleOfInvention Method for monitoring chamber cleanliness
abstract A method for evaluating a cleanliness of a tool, the method includes: receiving a wafer; cleaning the wafer; placing the wafer into the tool for a predefined period; removing the wafer from the tool, performing a contact angle measurement and determining the cleanliness of the wafer.
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