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publicationDate 2006-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2006021702-A1
titleOfInvention Cluster tool and method for process integration in manufacture of a gate structure of a field effect transistor
abstract A method and apparatus for process integration in manufacture of a gate structure of a field effect transistor are disclosed. The method includes assembling an integrated substrate processing system having a metrology module and a vacuumed processing platform to perform controlled and adaptive plasma processes without exposing the substrate to a non-vacuumed environment.
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