patent/US-2005263719-A1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005263719-A1

Outgoing Links

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classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A01G2013-006 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27D2099-0026
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filingDate	2005-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6cb0a946be47459aa10d9e294b0ffebe http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f801e760f7248b475721ddfa903fa79f
publicationDate	2005-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-2005263719-A1
titleOfInvention	Ultraviolet ray generator, ultraviolet ray irradiation processing apparatus, and semiconductor manufacturing system
abstract	The present invention relates to an ultraviolet ray generator 101, and the generator 101 has an ultraviolet ray lamp 1, a protective tube 2 being made of a material which is transparent with respect to ultraviolet ray and housing the ultraviolet ray lamp 1, and gas introduction port 6 a introducing nitrogen gas or inert gas into the protective tube 2.
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