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publicationDate 2005-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2005070126-A1
titleOfInvention System and method for forming multi-component dielectric films
abstract The present invention provides systems and methods for mixing precursors such that a mixture of precursors are present together in a chamber during a single pulse step in an atomic layer deposition (ALD) process to form a multi-component film. The precursors are comprised of at least one different chemical component, and such different components will form a mono-layer to produce a multi-component film. In a further aspect of the present invention, a dielectric film having a composition gradient is provided.
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