http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6214729-B1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c3a2f00e72ba6e4c09b6da573427fbed
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18
filingDate 1998-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2001-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf0bd3b888b299e20c9fe97cd5d93b33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_26b106bab26259be9d861e7313ecc159
publicationDate 2001-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6214729-B1
titleOfInvention Metal complexes with chelating C-, N-donor ligands for forming metal-containing films
abstract A method of forming a film on a substrate using transition metal or lanthanide complexes. The complexes and methods are particularly suitable for the preparation of semiconductor structures using chemical vapor deposition techniques and systems.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8481162-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7470470-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009156852-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8252375-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004194703-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7141488-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013000557-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005051086-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7767840-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005233156-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002146902-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003119312-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005006689-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005064207-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005070126-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7045451-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006115594-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7413776-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100459609-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004147086-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004198042-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007077733-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011212628-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7226861-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6984591-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005260823-A9
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7727588-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7217970-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7910177-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010102277-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7393785-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6444041-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6613656-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6548683-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6444818-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006265100-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6979370-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006030163-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005255243-A1
priorityDate 1998-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5112432-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5607722-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-4213292-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5924012-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5863836-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5259915-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5659057-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5084128-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-4313292-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5015747-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID246246523
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID248798686
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20644248
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID142368999
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449801387
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20644247
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID142368998
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID244968371
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452882135
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID142369000
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID142368997
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456866694
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID142368996
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128149576
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456866042
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411279907
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID546880
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID245021955

Total number of triples: 80.