| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44b2ac87aeadb161b83426d9cf6c4bdc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-3906
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0272 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L43-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L43-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 |
| filingDate |
2003-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d719d659156db3365ad9411f8ba09b83 |
| publicationDate |
2004-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2004127041-A1 |
| titleOfInvention |
Method for fabricating a mask, method for fabricating a patterned thin film and a micro device |
| abstract |
A laminated resist pattern with a T-shaped cross section is formed on a film to be patterned. The laminated resist pattern is composed of a bottom resist pattern and a top resist pattern. The surface area of the top resist pattern is larger than the surface area of the bottom resist pattern, and increased after the film is patterned via the laminated resist pattern. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7605006-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7178221-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7083989-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006172532-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005036242-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005037607-A1 |
| priorityDate |
2002-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |