| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
2002-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e21546b63609a1337d3e791540170228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_062dee04841d2ef4bd7116e84d7f9408
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3246a442c0a8aa661b1babf9936938a1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4d8d0b7281897b52e7b29e924d76b1a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9ec0b055d14dd615324a182a5944f21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66ff837398591cb2ca646971db6c0ceb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2df874194d9a583c0f3b5db1f7d9f002 |
| publicationDate |
2003-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2003226641-A1 |
| titleOfInvention |
Externally excited torroidal plasma source with magnetic control of ion distribution |
| abstract |
A plasma reactor is described that includes a vacuum chamber defined by an enclosure including a side wall and a workpiece support pedestal within the chamber defining a processing region overlying said pedestal. The chamber has at least a first pair of ports near opposing sides of said processing region and a first external reentrant tube is connected at respective ends thereof to the pair of ports. The reactor further includes a process gas injection apparatus (such as a gas distribution plate) and an RF power applicator coupled to the reentrant tube for applying plasma source power to process gases within the tube to produce a reentrant torroidal plasma current through the first tube and across said processing region. A magnet controls radial distribution of plasma ion density in the processing region, the magnet having an elongate pole piece defining a pole piece axis intersecting the processing region. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7169231-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8801892-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7371332-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9390943-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109599318-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113285223-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004112540-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10167220-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9284210-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004112539-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10225919-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9136794-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1593753-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013130513-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005006346-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004112538-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013220547-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-116066319-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017037854-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013014894-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7972469-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9908804-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008257261-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7534363-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9550694-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9533909-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9938151-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110226219-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1593753-A2 |
| priorityDate |
2000-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |