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filingDate 2002-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2003-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2003209738-A1
titleOfInvention Semiconductor device having silicon-including metal wiring layer and its manufacturing method
abstract In a semiconductor device, an insulating interlayer having a groove is formed on an insulating underlayer. A silicon-including metal layer including no metal silicide is buried in the groove. A metal diffusion barrier layer is formed on the silicon-including metal layer and the insulating interlayer.
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