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classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
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filingDate 2018-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2022-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f143a79ecdd1c20966ba5896d5342930
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f9f7b36180e30ab3bb48ddac4cd4e029
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f518f3a8073a77490a1d6274cbaa1546
publicationDate 2022-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-11531268-B2
titleOfInvention Positive-working photoresist composition, pattern produced therefrom, and method for producing pattern
abstract The present invention provides a positive photoresist composition having excellent storage stability, sensitivity, developing properties, plating resistance, and heat resistance. More specifically, a specific dissolution inhibitor in the form of an oligomer having the same repeating unit structure as the resin contained in the photoresist composition is applied to said composition.
priorityDate 2017-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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