| abstract |
The present invention relates to compounds of formula (I) and (IA)nâ–ˇnWherein X is -O(CO)-; R1 is C1-C12 haloalkyl or C6-C10 haloaryl; R2 is at position 7 of the coumarin ring and is OR8; R2a, R2b and R2c are independently of each other hydrogen R3 is a C1-C8 haloalkyl group or a C1-C8 haloalkyl group; R4 is hydrogen; and R8 is a C1-C6 alkyl group; it is suitable for use as a photoresist composition for preparation, for example, for preparing a spacer, for isolation A photosensitive acid donor in a layer, an interlayer dielectric film, an insulating layer, a planarization layer, a protective layer, an overcoat layer, an electroluminescent display, and a storage unit of a liquid crystal display (LCD). |