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Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7 |
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28518
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-456 |
| classificationCPCInventive |
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| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
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| filingDate |
2020-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2022-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6895ecf84dd3b7e5c42d44884b86fd38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f72717d5c681ff2dc2a61b8e24ad0e7
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_259c82fa63ec550349dfe2cf9bb219d0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab85cb8ffc452ab4c52eff07811a8dd4 |
| publicationDate |
2022-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-11476365-B2 |
| titleOfInvention |
Fin field effect transistor device structure and method for forming the same |
| abstract |
A method for forming a fin field effect transistor device structure includes forming a fin structure over a substrate. The method also includes forming a gate structure across the fin structure. The method also includes growing a source/drain epitaxial structure over the fin structure. The method also includes depositing a first dielectric layer surrounding the source/drain epitaxial structure. The method also includes forming a contact structure in the first dielectric layer over the source/drain epitaxial structure. The method also includes depositing a second dielectric layer over the first dielectric layer. The method also includes forming a hole in the second dielectric layer to expose the contact structure. The method also includes etching the contact structure to enlarge the hole in the contact structure. The method also includes filling the hole with a conductive material. |
| priorityDate |
2020-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |