http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11380800-B2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1225
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K10-468
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-0508
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66969
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-0529
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K10-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4908
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K10-474
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-0516
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78693
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1251
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-49
filingDate 2020-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2022-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21747acfb77b0d181ab4dff0d66658d4
publicationDate 2022-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-11380800-B2
titleOfInvention Semiconductor device
abstract The oxide semiconductor film has the top and bottom surface portions each provided with a metal oxide film containing a constituent similar to that of the oxide semiconductor film. An insulating film containing a different constituent from the metal oxide film and the oxide semiconductor film is further formed in contact with a surface of the metal oxide film, which is opposite to the surface in contact with the oxide semiconductor film. The oxide semiconductor film used for the active layer of the transistor is an oxide semiconductor film highly purified to be electrically i-type (intrinsic) by removing impurities such as hydrogen, moisture, a hydroxyl group, and hydride from the oxide semiconductor and supplying oxygen which is a major constituent of the oxide semiconductor and is simultaneously reduced in a step of removing impurities.
priorityDate 2010-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009186445-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008042088-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9059295-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007044714-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7732251-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9166058-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016372608-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7732819-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007529119-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002076356-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014175437-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8343817-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007209576-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006208977-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012132908-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008218495-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8188480-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8502221-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006284171-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009206341-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8274078-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010065844-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006292777-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008073653-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009278120-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009068773-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011175090-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009277701-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008308806-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008106191-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20030022692-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H05251705-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6727522-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7468304-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8158464-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007054507-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006043377-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20100019379-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009189155-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008126879-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005332718-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009186437-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007287296-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009134399-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007058329-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8203143-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8785242-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20090071358-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006110867-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011318875-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4415062-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2001046027-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006113549-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002056838-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006170111-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20090130089-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010038641-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7462862-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101283444-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008006877-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010003783-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006113565-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006108636-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009152541-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8946703-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008258143-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002289859-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7064346-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010032668-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009008639-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8785240-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007108446-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013009209-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011095288-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11505377-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003273361-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005093850-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7674650-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S63239117-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8368079-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013313550-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7402506-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007152217-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005199960-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007073701-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8203144-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S63215519-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7282782-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011240992-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006238135-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008182358-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006108529-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004273614-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009224737-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7453065-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009073325-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8525165-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010092800-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007201366-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000044236-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007046191-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010163863-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011248260-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008224133-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S63265818-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007272922-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8129719-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8049225-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000150900-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006231882-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7601984-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20100019357-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005033172-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006091793-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7297977-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7411209-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8647031-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9842937-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006228974-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010200843-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008129195-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009170905-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008210934-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005199959-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003086808-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012286278-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011240993-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003218222-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010051937-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7518178-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7211825-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009139428-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011240995-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009166616-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002132454-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005017302-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007165468-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006169973-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009127552-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007252928-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009114910-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010059746-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011095195-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8134156-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006165528-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H08264794-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8247276-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007066986-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004114391-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010244022-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007052025-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8420442-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003189401-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9105659-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008083950-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006197092-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011240994-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5744864-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010264412-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8900917-B2
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397310
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426098968
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327157
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425270609
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359268
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5794
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520486
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419491804
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559594
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419405613
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID166653
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69667
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82895
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419553716
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5139834
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447573583
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559477
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23932
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID158605
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23963
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415776239
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977

Total number of triples: 213.