| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1894637205a6363e54f3117d66b6fa14 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate |
2019-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01f3c60c016032d3a187bf6750ee27ba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a443cecfab4f6302a803a1aea6ccd028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79c0eb04239293006a09aab5d614a1d8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09e3d35759d5aeba5303715c66dae113 |
| publicationDate |
2020-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20200123648-A |
| titleOfInvention |
Slurry composition for chemical mechanical polishing of metal film |
| abstract |
The present invention relates to a surface treatment composition and a surface treatment method using the same, wherein the surface treatment composition according to an embodiment of the present invention comprises: abrasive particles; Metal etchant; Stabilizers; And an etching inhibitor. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023278215-A1 |
| priorityDate |
2019-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |