http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190070998-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8205ec6ee1cd95eb60a03826535bad97 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02315 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02689 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-326 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-326 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-04 |
| filingDate | 2011-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4cbe49112b94fc23a96daaab6e4cf7f |
| publicationDate | 2019-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20190070998-A |
| titleOfInvention | Plasma annealing method and device for same |
| abstract | [PROBLEMS] To provide a plasma annealing apparatus which can change the crystal structure of a film by processing a film (coating film) on a substrate and is excellent in productivity. [MEANS FOR SOLVING PROBLEMS] A method for manufacturing a film that changes the crystal structure of a constituent material of a film including a step (A) of irradiating a film on a substrate with an atmospheric pressure plasma. The process (A) generates a plasma at an atmospheric pressure by a frequency of 10 Hz to 100 MHz and a voltage of 60 V to 1 million V, and irradiates the plasma directly onto the film on the substrate. A method for changing the crystal structure of a constituent material of a film comprising the step (A). A plasma generating apparatus used in a film forming method of the step (A). (A). |
| priorityDate | 2010-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 66.