patent/KR-20180071747-A

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180071747-A

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2f90bef5e4eea79269d893d138eda905
classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-334 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-325
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-325 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02529 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3213 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02115 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02167 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02527 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67098 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J49-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02315 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J49-105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45512 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3255 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4404 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32642
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-56
filingDate	2016-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03a965c8b57c9362e3608adbd810df04
publicationDate	2018-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	KR-20180071747-A
titleOfInvention	Part for semiconductor manufactoring, part for semiconductor manufactoring including complex coating layer and method of manufacturning the same
abstract	According to one embodiment of the present invention, there is provided a component for semiconductor manufacturing comprising a composite comprising SiC and C, wherein the Si: C atomic ratio of the composite is from 1: 1.1 to 1: 2.8.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220064945-A
priorityDate	2016-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110026969-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160137746-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150044695-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20020077163-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140074531-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006294671-A
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414859283 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID297 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426098976 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327210 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6547 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559581

Total number of triples: 51.