http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160141569-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e11d38118509e1fbfb8f76182b378406 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 |
| filingDate | 2015-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6394cc0a2cda2bf504ce1215bd368271 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_54cc11e35583738e77548d6784e3d58b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af3d322a74e943e30735036bfc7bf287 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a393224c617e02b3914eaecbab73bbac |
| publicationDate | 2016-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20160141569-A |
| titleOfInvention | Composition for photoresist fine pattern and method for preparing the composition and method for reducing pattern dimension in photoresist layer using the same |
| abstract | The present invention is a technology related to a composition for forming photoresist micropatterns containing a water-soluble polymer composition, a preparation method of the same, and a method for forming photoresist micropatterns using the same, and more specifically, to a composition for photoresist micropatterns, to a preparation method of the same, and to a method for forming photoresist micropatterns using the same, which reduces the size of contact holes of photoresist pattern by coating the photoresist pattern with a composition for forming photoresist micropatterns containing a water-soluble polymer of chemical formula 1 and a solvent. |
| priorityDate | 2015-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 69.