| abstract |
[MEANS FOR SOLVING PROBLEMS] (A) An onium salt represented by the formula (1) or (2) (B) a resin (U-1) having a repeating unit represented by the formula (3), (C) Crosslinking agent Wherein the negative resist composition comprises a positive resist composition. Represents a cyclic structure having a nitrogen atom interposed therebetween. [Effect] The chemically amplified negative resist composition of the present invention can effectively control acid diffusion upon exposure, has a very high resolution at the time of pattern formation, and can obtain a pattern with reduced LER. |