| abstract |
A salt represented by the formula (I) Wherein, X is an oxygen atom, a sulfur atom or -N (SO 2 R 5) - represents; R 5 is a C 1 -C 12 alkyl group which may have a fluorine atom and in which the methylene group may be substituted with an oxygen atom or a carbonyl group, a C 3 -C 12 cycloalkyl group which may have a fluorine atom, or a C 6 -C 12 An aromatic hydrocarbon group; Ar represents a C6-C36 aromatic hydrocarbon group which may have a substituent or a C4-C36 heteroaromatic hydrocarbon group which may have a substituent; R 1 and R 2 each independently represent a hydrogen atom, a hydroxy group, or a C 1 -C 12 hydrocarbon group in which the methylene group may be substituted with an oxygen atom or a carbonyl group; "m" and "n " each independently represent 1 or 2; R 3 and R 4 each independently represent a hydrogen atom or a C 1 -C 12 hydrocarbon group; R 3 and R 4 may combine to form a ring; or R 3 or R 4 may form a ring together with Ar; A - represents an organic anion having an acid-labile group, an organic anion having a base-labile group, an acid-labile group and an organic anion having a base- labile group. |