| abstract |
The present invention provides salts of formula (I). Formula I In Formula I, Q 1 and Q 2 are each independently a fluorine atom or a C1-C6 perfluoroalkyl group, L 1 is a C1-C17 divalent saturated hydrocarbon group, wherein at least one -CH 2 -is -O- or -CO May be replaced by —, ring W is a C3-C36 aliphatic ring, wherein one or more —CH 2 — may be replaced by —O—, —S—, —CO— or —SO 2 —, One or more hydrogen atoms can be replaced by a hydroxyl group, a C1-C12 alkyl group, a C1-C12 alkoxy group, a C3-C12 cycloaliphatic hydrocarbon group or a C6-C10 aromatic hydrocarbon group, each of R f is independently a fluorine atom Or a C1-C6 fluorinated alkyl group, n is an integer from 1 to 10, and Z + is an organic counter ion. |