| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32339
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-517 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-511
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-517
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
2002-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2003-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20030088117-A |
| titleOfInvention |
Microwave plasma process device, plasma ignition method, plasma forming method, and plasma process method |
| abstract |
According to the present invention, the plasma plasma processing apparatus 10 is provided with plasma ignition promoting means for promoting plasma ignition by microwaves. The plasma ignition promoting means has a deuterium lamp 30 for generating vacuum ultraviolet light, and a transmission window 32 for transmitting the vacuum ultraviolet light to the plasma excitation space 26. The transmission window 32 is configured as a convex lens and focuses vacuum vacuum light to promote ionization of the plasma excitation gas. With such a configuration, plasma ignition can be performed easily and quickly. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101023645-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100979187-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101029089-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100963848-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101434145-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100864111-B1 |
| priorityDate |
2001-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |