abstract |
An object of the present invention is to provide a method and composition for selectively modifying the surface of a substrate that can easily, selectively, and with high density modify a surface region containing a metal. The present invention provides a process for preparing a substrate having a first region containing a metal on a surface layer, a first polymer having a group including a first functional group binding to the metal on the surface of the substrate at the end of the main chain or side chain, and It is a selective modification method of the surface of a base material provided with the process of coating the composition containing a solvent, and the process of heating the coating film formed by the said coating process. It is preferable that the substrate further includes a second region containing substantially only a non-metal, and further comprising, after the heating step, a step of removing a portion of the coating film formed on the second region with a rinsing solution. It is preferable that the said metal comprises a metal single-piece|unit, an alloy, a conductive nitride, or a silicide. |