http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101948186-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31122 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02211 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32139 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02252 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00 |
| filingDate | 2016-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101948186-B1 |
| titleOfInvention | Dry etching method and dry etching agent |
| abstract | The present invention has been made in view of the above problems and provides an etching method capable of suppressing the occurrence of abnormalities such as a bowing or roughness of a side wall surface when the amorphous carbon is etched. (Solution) A plasma gas obtained by plasma-forming a dry etching agent containing at least oxygen and alkylsilane on a substrate having an amorphous carbon film provided in the chamber is used, and the amorphous carbon film is plasma-etched using the inorganic film as a mask Dry etching method is used. That the said alkyl silane, (CH 3) 4 Si, (CH 3) 3 SiH, (CH 3) 2 SiH 2 and (CH 3) at least one species selected from the group consisting of SiH 3 are preferred. |
| priorityDate | 2015-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.