http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101806480-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2258-0216 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2021-60187 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67011 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67207 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
| filingDate | 2016-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101806480-B1 |
| titleOfInvention | By-product collecting device caused during the semiconductor manufacturing process |
| abstract | [0001] The present invention relates to a by-product collecting apparatus that occurs during a semiconductor manufacturing process, and more particularly, to an apparatus and method for collecting by-products, which are provided with a gas inlet and a gas outlet on an upper plate and a lower plate that are detachably coupled to upper and lower openings, A housing having a passage through which the refrigerant flows; An upper horizontal bracket fixed horizontally at an upper portion of the housing to uniformly distribute the exhaust gas flowing into the housing through the gas inlet of the upper plate in the horizontal and vertical directions and to collect some by-products in powder form; The exhaust gas flowing in the vertical direction through the upper horizontal bracket in a state of being installed between the upper horizontal bracket and the lower horizontal bracket or passing the exhaust gas flowing in the lateral direction through the inner space of the housing in the horizontal and vertical directions, An internal collection tower for collecting in the form of; The exhaust gas flowing in the vertical direction through the inner collecting tower at the bottom of the inner collecting tower or the exhaust gas flowing in the lateral direction through the inner space of the housing is guided to the gas outlet side of the lower plate, And a lower horizontal bracket for collecting the by-product in powder form. Therefore, the structure is simple and the by-product collecting capacity can be greatly increased, so that the replacement period of the by-product collecting apparatus can be significantly extended in the semiconductor manufacturing apparatus, and the reaction by-products can be collected quickly and efficiently over a long period of time, The efficiency of collecting various byproducts generated during manufacturing, as well as productivity and reliability due to semiconductor manufacturing can be greatly improved. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220164829-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102311939-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102311930-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102439402-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20230130785-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11555243-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020088369-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11173439-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102209205-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102228180-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11117086-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I707717-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200062901-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11462422-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10987619-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021027309-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11562943-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210017404-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210017406-A |
| priorityDate | 2016-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 45.