| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b5f60e15501324fd877c613f81d71042 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B15-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67207 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B5-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D46-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D46-2411
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B15-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D45-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D50-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67207
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D50-002 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B15-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D46-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D45-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D50-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate |
2019-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5f019335720e5696c8c687474f47ab0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1165185185c12580361ad9966b32076f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_774c74aafa0dddbe2eb8efd64a8ecdc4 |
| publicationDate |
2021-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-11117086-B2 |
| titleOfInvention |
Apparatus for collecting by-product of semiconductor manufacturing process |
| abstract |
The apparatus for collecting by-products of the present disclosure includes: a cylindrical housing that has a top plate having a gas inlet and a bottom plate having a gas outlet extending and protruding inside the housing, and receives and then discharges an exhaust gas flowing inside; and a flow path change-type vertical internal collection tower that is installed in a hanging state inside the housing and includes a disc type collector, a diffusion plate, a cylindrical collector, and a cylindrical filter collector for collecting by-products in an exhaust gas flowing inside. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022228261-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11555243-B2 |
| priorityDate |
2019-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |