http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101633700-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-41733 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-41733 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66969 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-45 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66742 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate | 2014-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101633700-B1 |
| titleOfInvention | Semiconductor device and method for manufacturing the semiconductor device |
| abstract | One of the purposes is to suppress deterioration of device characteristics even when an oxide semiconductor is formed after formation of the gate insulating layer, the source electrode layer, and the drain electrode layer. A gate electrode layer is formed on a substrate, a gate insulating layer is formed on the gate electrode layer, a source electrode layer and a drain electrode layer are formed on the gate insulating layer, the surface of the gate insulating layer, the source electrode layer and the drain electrode layer formed on the substrate is subjected to surface treatment After the surface treatment, the oxide semiconductor layer is formed on the gate insulating layer, the source electrode layer, and the drain electrode layer. |
| priorityDate | 2008-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 38.