http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100927983-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-40114 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0223 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02252 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02238 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28247 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02233 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02236 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2006-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2009-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2009-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100927983-B1 |
| titleOfInvention | Substrate Processing Method and Substrate Processing Equipment |
| abstract | On the one hand, the substrate to be processed is appropriately oxidized, and on the other hand, it is possible to suppress oxidation of the substrate to be processed. A substrate processing method for selectively oxidizing a portion of a metal film and a polysilicon film exposed on a substrate to be processed, wherein the mixed gas of hydrogen gas and oxygen or oxygen-containing gas supplied to the substrate is plasma discharged and mixed plasma And generating a hydrogen plasma by plasma discharge of hydrogen gas supplied to the substrate to be processed, and processing the substrate by the hydrogen plasma. And selectively oxidizes at least a portion of the polysilicon of the substrate to be processed.n n n n Plasma, wafer, tungsten, selective oxidation |
| priorityDate | 2005-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.