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publicationDate 2004-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-100450985-B1
titleOfInvention Slurry for chemical mechanical polishing
abstract When the embedded wiring of the copper metal is formed on the barrier metal film of the tantalum metal by the use of a polishing slurry containing at least abrasive abrasives, an oxidizing agent, and a basic amino acid, It is possible to suppress dishing and erosion that may occur during CMP).
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