http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000109799-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 1998-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a40d349f03617619ed73ebcb7fd90686 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31ed0e7191632a5f9009755f39fe3f4c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01cd19963303720d983c66c36402f1e2 |
| publicationDate | 2000-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2000109799-A |
| titleOfInvention | CMP polishing agent and substrate polishing method |
| abstract | (57) [Summary] A waste liquid treatment is easy, and a surface to be polished such as a silicon oxide film can be polished at high speed without scratches. To make 10 or more C An MP polishing agent and a method for polishing a substrate using the CMP polishing agent are provided. A CMP polishing agent comprising cerium oxide particles, a dispersant, a biodegradable additive, and water, wherein the biodegradable additive is polyamino acid and its derivative C MP abrasive. A CMP polishing slurry comprising a cerium oxide slurry containing cerium oxide particles, a dispersant and water, and an additive liquid containing a biodegradable additive and water. The substrate on which the film to be polished is formed is pressed against the polishing cloth of the polishing platen and pressurized, and while the CMP polishing agent is supplied between the polishing film and the polishing cloth, the substrate and the polishing platen are moved to polish the film to be polished. Substrate polishing method. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6585786-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100450985-B1 |
| priorityDate | 1998-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 109.