http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2018078929-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F212-08 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07H13-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07H7-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F293-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D155-005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D125-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F290-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D153-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B27-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B27-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F212-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F212-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07H13-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D7-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F297-026 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-36 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-36 |
| filingDate | 2017-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2018078929-A1 |
| titleOfInvention | Pattern forming method, base agent and laminate |
| abstract | A step of applying a base agent on the substrate, and a step of applying the self-assembling composition for pattern formation to the surface of the substrate coated with the base agent and forming a self-assembled film by self-organized phase separation. A pattern forming method comprising: a pattern forming self-assembling composition represented by a formula (105): a polymerization portion a having at least one of structures represented by the formula (103) and the formula (104): A pattern forming method comprising: a polymer part b having a structure; and a block copolymer having a sugar part content of 3% by mass or more and 80% by mass or less. A polymer part a having at least one of the structures represented by formula (103) and formula (104); and a polymer part b having a structure represented by formula (105), wherein the sugar content is 3 It has a (meth) acrylate-derived unit and a substituent which may have a substituent, which is used for phase-separating a self-assembling composition for pattern formation containing a block copolymer of not less than 80% by mass and not more than 80% by mass A base agent comprising a polymer containing at least one selected from styrene-derived units. An underlayer comprising a substrate, a polymer containing at least one selected from a (meth) acrylate-derived unit that may have a substituent and a styrene-derived unit that may have a substituent, and the formula (103) And a polymer part a having at least one of the structures represented by the formula (104) and a polymer part b having a structure represented by the formula (105), wherein the sugar content is 3% by mass or more and 80% %, And a laminated body having a pattern forming layer containing a block polymer that is not more than |
| priorityDate | 2016-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 327.